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a) Overall view of the CMOS-MEMS high-frequency resonator. (b

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Last updated 02 abril 2025
a) Overall view of the CMOS-MEMS high-frequency resonator. (b
a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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